UMC makes first 45nm memory chips

Posted on Wednesday, Nov 22 2006 @ 05:26 CET by Thomas De Maesschalck
UMC has successfully manufactured the first 45nm SRAM chips:
The ICs were made using sophisticated immersion lithography for its 12 critical layers, incorporating the latest technology advancements.

Immersion lithography is a resolution enhancement technique that interposes a liquid medium between the scanner optics and the wafer surface, replacing the traditional air gap.

The optical resolution is enhanced since the immersion fluid, which has a higher refractive index than air, allows using lenses with a higher numerical aperture. The result is more accurate patterns imprinted on the silicon wafer.


About the Author

Thomas De Maesschalck

Thomas has been messing with computer since early childhood and firmly believes the Internet is the best thing since sliced bread. Enjoys playing with new tech, is fascinated by science, and passionate about financial markets. When not behind a computer, he can be found with running shoes on or lifting heavy weights in the weight room.



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