TSMC unveiled it's planning to move to 22nm by 2011:
Taiwan Semiconductor Manufacturing Company (TSMC) has said it is on track to increase manpower within its R&D and design service units by 30% and 15%, respectively, while proceeding with its advanced-node plans. The leading pure-play foundry looks to make the transition to 32nm in 2010, and move to sub-32nm by 2011 at the earliest.
Company CEO Rick Tsai said the number of R&D staff will expand 30% from 1,200 at present, and TSMC will add 15% more to its design service workforce, which has now grown to 600.
TSMC has already begun co-development of multiple e-beam technology for 22nm and more-advanced process nodes with its equipment suppliers, according to Tsai.