Sony and Toshiba's embedded DRAM goes 45nm

Posted on Saturday, Jun 18 2005 @ 05:21 CEST by Thomas De Maesschalck
Sony and Toshiba have developed the first 45nm embedded DRAM cell by scaling embedded DRAM cells down to 0.069 square microns.
When the embedded DRAM scales down, the capacitance of the deep trench capacitor decreases. To compensate for the decreased capacitance, the R&D team introduced a bottle etching process combined with a structure named LOCOS collar, which allows forming the trench in a bottle like shape. The trench, therefore, is wide but has a narrow month that increases the trench's surface area, increasing capacitance.
The companies have jointly developed 90nm and 65nm process technologies and are now in the third phase of the 45nm process development. More details about the development can be found at EET


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Thomas De Maesschalck

Thomas has been messing with computer since early childhood and firmly believes the Internet is the best thing since sliced bread. Enjoys playing with new tech, is fascinated by science, and passionate about financial markets. When not behind a computer, he can be found with running shoes on or lifting heavy weights in the weight room.



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