“Supported by our customer co-investment program, we have completed the concepts of our 450mm architecture for use in EUV and immersion versions, so as to deliver prototypes by 2015, compatible for a 2018 production ramp, if confirmed by the industry in time,” a statement by ASML reads.
At the SEMI Industry Strategy Symposium (ISS) earlier this year Intel demonstrated a 450mm wafer that is fully patterned for the first time. This wafer was created after intense collaboration which was necessary between Intel and various suppliers, three of whom are Sumco, Dainippon Printing and Molecular Imprints, according to Intel.
ASML: 450mm commercial production to start in 2018
Posted on Monday, April 22 2013 @ 13:18 CEST by Thomas De Maesschalck
Dutch semiconductor manufacturing equipment maker ASML announced it's on track to deliver prototypes of its 450mm equipment by 2015, and estimates commercial 450mm production may kick off in 2018. Full details at X-bit Labs.