“The EUV scanners are for 10 nanometers,” said ASML executive vice president Frits van Hout in an interview on the sidelines of a TSMC event on Dec. 4. “They’re going to use them to prepare for production in 7 nanometers.”Source: EE Times
TSMC spokesperson Elizabeth Sun declined to comment.
The shift toward EUV may signal a switch in the conventional wisdom on the next generation of lithography equipment. The earlier expectation was for chipmakers to use traditional immersion lithography for production of 10 nm chips instead of the long-delayed EUV systems.
TSMC to use EUV for its 7nm process in 2018
Posted on Tuesday, December 09 2014 @ 14:20 CET by Thomas De Maesschalck