The 3 nm node is going into trial production in the first half of 2021, while the mass production is supposed to commence in 2022. As far as the 2 nm node, TSMC has recently purchased more expensive Extreme Ultra-Violet (EUV) lithography machines for the 2 nm node. Due to the high costs of these EUV machines, TSMC's capital spending will not be revisited this year and it should remain in the $16 billion range. As far as a timeline for 2 nm is concerned, we don't know when will TSMC start trial production as the node is still in development phases.
"TSMC accelerates 2nm R&D"
— RetiredEngineer® (@chiakokhua) June 8, 2020
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