EUV is the next step in semiconductor manufacturing, after overcoming lots of technical challenges over the past two decades the technology is finally making it into mainstream production. Compared with traditional immersion lithography, EUV reduces the usage of multi-patterning techniques when making highly complex circuits. ASML is the only company in the world that makes these machines.
TSMC has placed orders for 'at least' 13 EUV systems with ASML, reports DigiTimes citing undisclosed industrial sources. These tools are set to be delivered throughout 2021, though exact delivery and installation schedule is unknown. Meanwhile, TSMC's actual needs for next year might be as high as 16 – 17 EUV scanners as the company is ramping up production using its fabrication technologies that feature EUV layers. TSMC has not confirmed the report.Via: Tom's Hardware