Real World Technologies takes a look at the current state of the process technologies used by semiconductor industry, you can read it over here.
At IEDM 2008, the focus of the process technology session was the industry-wide transition to 32nm. There were five different papers on 32nm processes and every one relied on high-k dielectrics and metal gates to increase control over the channel and decrease leakage.
The transition to high-k/metal gates was quite challenging for the industry and accelerated the consolidation of digital logic manufacturers. The 45nm process was a turning point for several former stalwarts that ultimately chose to cease internal development of new process technologies.