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Samsung developing sub-28nm process technology

Posted on Thursday, November 05 2009 @ 17:48:31 CET by

EE Times writes Samsung researchers have begun work on advanced process development, including sub-28nm foundry processes:
The company said that Samsung Foundry is in mass production at 45-nm and is preparing for 32- and 28-nm production through Samsung's participation in the IBM Technology Alliance. The newly-formed Semiconductor R&D center brings together logic and memory process research teams to investigate materials, transistor structures, and to provide early access to leading-edge process equipment, Samsung added.

The Semiconductor R&D center is working on sub-28-nm process technology. At these nodes the company expects to make use of memory process development advancements in foundry logic processes and vice versa. Technologies under research include high-K dielectrics, 3-D transistors, and extreme ultra violet (EUV) lithography. Interconnect and packaging including through silicon via are also expected to be important at these nodes.



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