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One analyst has disclosed more details about the 22-nm lithography business at Intel. ''We believe, based on our industry checks, that Intel is about to finalize its decision on its 22-nm lithography vendors, and that ASML and Nikon are both expected to share the immersion lithography opportunity, unlike 32-nm where Nikon was the sole equipment supplier,'' said Jagadish Iyer, an analyst at Arete Research LLC, in a report.

As reported, ASML and Nikon split Intel's 45-nm lithography business. Nikon was the sole supplier for 32-nm. The 32-nm node was the first time that Intel used immersion lithography.

At 22-nm, Intel will continue to use 193-nm immersion lithography, this time, from two suppliers. Intel is ramping up its 45-nm processor lines, and has announced its 32-nm devices for delivery in 2010.