PC Mag reports Toshiba has committed about 15 billion yen ($159.8 million) this year to build a test production line for sub-25nm NAND flash memory chips.
Toshiba hopes to kick off mass production of the chip as early as 2012, the report said without citing sources.
The company will install the line at the fourth fabrication facility of its key NAND flash memory plant in Yokkaichi, Mie Prefecture, the report said, adding Toshiba must upgrade its exposure technology to make the smaller chips.
Current technology can churn out flash memory in sizes as small as the upper 20s. But making sub-25nm chips requires extreme ultraviolet lithography, which uses shorter wavelengths, the paper said.