Lithography system provider Nikon suffered the most as its main factory sites are located in Miyagi and Tochigi prefectures, areas particularly affected by the disaster.
Nikon revealed that its group companies, including Sendai Nikon (Natori, Miyagi Pref.), Miyagi Nikon Precision (Zao-machi, Katta-gun, Miyagi Pref), Tochigi Nikon (Otawara, Tochigi Pref), Tochigi Nikon Precision (Otawara, Tochigi Pref), and other subsidiaries as well as its plants suffered damage to part of the equipment and buildings. According to the company's latest update, operations there remain closed.
Damage to fabs of three major Japanese fab-tool suppliers
Posted on Tuesday, March 22 2011 @ 6:35 CET by Thomas De Maesschalck
DigiTimes reports three major Japanese suppliers of semiconductor manufacturing equipment have suspended production at several of their fabs in the earthquake-struck zone with no timeframe for when they will reopen.