Intel formally confirmed it will not use EUV for its 10nm process, a decision that has been publicly known for almost two years. But more importantly, the company also raised doubts about the introduction of EUV on the 7nm node.
EUV manufacturing has been delayed for many years and fears about further delays spurred Intel to come up with a plan B: a 7nm production process that does not require EUV technology but continues to really on immersion. Intel said it will adopt EUV gradually, depending on how mature the technology is. Some layers of the 7nm node will be converted to EUV when ASML's tools have hit the desired uptime and wafer throughput volume.