Axcelis said AMD has placed a second order for its single wafer Optima MD implanter. The system will ship this month to AMD's 300mm fab in Dresden, Germany, where it will enable production of 65nm and 45nm chips.
"The relationship between AMD and Axcelis continues to strengthen as we achieve major performance milestones with our initial tool placement," said Mary Puma, chairman and CEO of Axcelis. "In particular, the Optima MD provides unmatched precision in the areas of dopant placement and angle control, two key advantages when producing advanced devices. Moreover, the platform's broad energy range delivers the flexibility and capital efficiency AMD needs to achieve its productivity goals."
The Optima MD is the first tool in Axcelis' new series of simple, cost-effective implanters that give users complete, extendible applications coverage in and beyond the 65nm technology node.
With a broad energy range of 500eV to 750keV, the system supports a wide array of low energy, mid-dose implant applications, especially HALO processes. The Optima MD also enables customers to cover evolving well and channel implants while still achieving high levels of productivity for more traditional implant applications.