Intel's 65nm yields are already mature

Intel claims its upcoming 65nm process is doing well, stating it has reached similar yields as the current 90nm level.

It's no secret anymore that Intel will introduce a range of processors that will showcase the firm's 65 nm production process. Smaller structures - which includes gate lengths of 35 nm in Intel's 65 nm processors - allow semiconductor firms to squeeze more units on one wafer and, theoretically, increase production output, efficiency and profit. However, smaller structures also get more complex from generation to generation and require enormous investments and expensive approaches to achieve high yield rates of finished and functional products.

More details over here.